Ultrahigh-top Quality single crystals of silicon carbide by alternate repetition of progress perpendicular to c-axis CMP of single-crystal SiC was 1st reported by Zhou [22] in 1997. He located that chemical reactions of CMP could be improved by raising the temperature (T) and also the pH on the slurry. The https://www.quora.com/profile/Trevor-Flatcher-2/Innovative-Applications-of-Silicon-Carbide-in-Sensor-Technology-Silicon-carbide-SiC-a-versatile-semiconductor-materi